Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10119712 | Room condition monitoring system | Gino A. Pinto, Eric Beishline, Sunil Barot, Kevin M. Bourbeau, Anthony T. Batista +3 more | 2018-11-06 |
| 6631334 | Pressure-based mass flow controller system | — | 2003-10-07 |
| 6349744 | Manifold for modular gas box system | — | 2002-02-26 |
| 5968594 | Direct liquid injection of liquid ammonia solutions in chemical vapor deposition | Jianhua Hu | 1999-10-19 |
| 5948283 | Method and apparatus for enhancing outcome uniformity of direct-plasma processes | — | 1999-09-07 |
| 5737175 | Bias-tracking D.C. power circuit for an electrostatic chuck | Ralph Kerns, Peter P. Laquidara | 1998-04-07 |