Issued Patents All Time
Showing 1–25 of 25 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6637446 | Integrated substrate processing system | David T. Frost, Mike Wallis | 2003-10-28 |
| 6625835 | Disk cascade scrubber | David T. Frost, Scott Petersen, Donald E. Stephens, Anthony Samuel Jones, III, Bryan Riley | 2003-09-30 |
| 6615510 | Wafer drying apparatus and method | Kenneth C. McMahon, Jonathan Borkowski, Scott Petersen, Donald E. Stephens, Yassin Mehmandoust +1 more | 2003-09-09 |
| 6616509 | Method for performing two wafer preparation operations on vertically oriented semiconductor wafer in single enclosure | David T. Frost | 2003-09-09 |
| 6588043 | Wafer cascade scrubber | David T. Frost, Scott Petersen, Donald E. Stephens, Anthony Samuel Jones, III, Bryan Riley | 2003-07-08 |
| 6482678 | Wafer preparation systems and methods for preparing wafers | David T. Frost | 2002-11-19 |
| 6477786 | Apparatus for drying batches of disks | Kenneth C. McMahon, Jonathan Borkowski, Scott Petersen, Donald E. Stephens, Yassin Mehmandoust +1 more | 2002-11-12 |
| 6461224 | Off-diameter method for preparing semiconductor wafers | David T. Frost | 2002-10-08 |
| 6457199 | Substrate processing in an immersion, scrub and dry system | David T. Frost, Mike Wallis | 2002-10-01 |
| 6446355 | Disk drying apparatus and method | Kenneth C. McMahon, Jonathan Borkowski, Scott Petersen, Donald E. Stephens, Yassin Mehmandoust +1 more | 2002-09-10 |
| 6439978 | Substrate polishing system using roll-to-roll fixed abrasive | David T. Frost | 2002-08-27 |
| 6430841 | Apparatus for drying batches of wafers | Jonathan Borkowski, Kenneth C. McMahon, Scott Petersen, Donald E. Stephens, Yassin Mehmandoust +1 more | 2002-08-13 |
| 6427566 | Self-aligning cylindrical mandrel assembly and wafer preparation apparatus including the same | John G. Dewit | 2002-08-06 |
| 6368192 | Wafer preparation apparatus including variable height wafer drive assembly | David T. Frost, John G. Dewit | 2002-04-09 |
| 6345404 | Wafer cleaning apparatus | Donald E. Stephens, Hugo John Miller, III | 2002-02-12 |
| 6328640 | Wafer preparation apparatus including rotatable wafer preparation assemblies | John G. Dewit | 2001-12-11 |
| 6230753 | Wafer cleaning apparatus | Jim Vail | 2001-05-15 |
| 6213136 | Robot end-effector cleaner and dryer | — | 2001-04-10 |
| 6143089 | Method of cleaning semiconductor wafers and other substrates | Donald E. Stephens, Hugo John Miller, III | 2000-11-07 |
| 6024107 | Apparatus for cleaning robot end effector | — | 2000-02-15 |
| 6012470 | Method of drying a wafer | — | 2000-01-11 |
| 5875507 | Wafer cleaning apparatus | Donald E. Stephens, Hugo John Miller, III | 1999-03-02 |
| 5778554 | Wafer spin dryer and method of drying a wafer | — | 1998-07-14 |
| 5490809 | System and method for texturing magnetic data storage disks | Donald E. Stephens | 1996-02-13 |
| 5486134 | System and method for texturing magnetic data storage disks | Donald E. Stephens | 1996-01-23 |