MF

Mathias Fecher

Lam Research: 1 patents #1,364 of 2,128Top 65%
Overall (All Time): #3,582,741 of 4,157,543Top 90%
1
Patents All Time

Issued Patents All Time

Patent #TitleCo-InventorsDate
6235640 Techniques for forming contact holes through to a silicon layer of a substrate Timothy M. Ebel 2001-05-22