Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9599241 | Clack valve assembly | Harish Agadi, Lee Randle, Michael John James | 2017-03-21 |
| 7763147 | Arc suppression plate for a plasma processing chamber | Roger Schutz | 2010-07-27 |
| 7626699 | Chamber particle detection system | — | 2009-12-01 |
| 7417733 | Chamber particle detection system | — | 2008-08-26 |
| 6306011 | System for controlling the size and surface geometry of an orifice | Winfield B. Perry, Liam O'Shea | 2001-10-23 |