Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5670066 | Vacuum plasma processing wherein workpiece position is detected prior to chuck being activated | Michael Barnes | 1997-09-23 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5670066 | Vacuum plasma processing wherein workpiece position is detected prior to chuck being activated | Michael Barnes | 1997-09-23 |