Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11515128 | Confinement ring with extended life | — | 2022-11-29 |
| 11008655 | Components such as edge rings including chemical vapor deposition (CVD) diamond coating with high purity SP3 bonds for plasma processing systems | — | 2021-05-18 |
| 10096471 | Partial net shape and partial near net shape silicon carbide chemical vapor deposition | — | 2018-10-09 |