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Gunter METTIN

Lam Research: 1 patents #1,364 of 2,128Top 65%
Overall (All Time): #3,062,825 of 4,157,543Top 75%
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Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
9090854 Method and apparatus for processing wafer-shaped articles Stephan Hoffmann, Harald Kraus 2015-07-28