Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11535936 | Dual gas feed showerhead for deposition | Michael Philip Roberts | 2022-12-27 |
| 10941489 | Rotary friction welded blank for PECVD heated showerhead | Kurt Kern | 2021-03-09 |
| 10483092 | Baffle plate and showerhead assemblies and corresponding manufacturing method | Lance Dyrdahl | 2019-11-19 |
| 10266947 | Rotary friction welded blank for PECVD heated showerhead | Kurt Kern | 2019-04-23 |
| 9290843 | Ball screw showerhead module adjuster assembly for showerhead module of semiconductor substrate processing apparatus | — | 2016-03-22 |