Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5835333 | Negative offset bipolar electrostatic chucks | Ken Edwin Tokunaga, Boris Atlas, David R. Liu | 1998-11-10 |
EC
Edward Castro
Overall (All Time): #3,702,658 of 4,157,543Top 90%
1
Patents All Time