Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| RE45280 | Segmented coil for generating plasma in plasma processing equipment | — | 2014-12-09 |
| 6184488 | Low inductance large area coil for an inductively coupled plasma source | — | 2001-02-06 |
| 5874704 | Low inductance large area coil for an inductively coupled plasma source | — | 1999-02-23 |
| 5731565 | Segmented coil for generating plasma in plasma processing equipment | — | 1998-03-24 |