Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5908320 | High selectivity BPSG:TiSi.sub.2 contact etch process | Dinh Lau Chu | 1999-06-01 |
| 5904862 | Methods for etching borophosphosilicate glass | Dinh Lau Chu | 1999-05-18 |
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5908320 | High selectivity BPSG:TiSi.sub.2 contact etch process | Dinh Lau Chu | 1999-06-01 |
| 5904862 | Methods for etching borophosphosilicate glass | Dinh Lau Chu | 1999-05-18 |