Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6283355 | End effector for substrate handling | Edmund L. Ma, Christopher O. Lada | 2001-09-04 |
| 6073828 | End effector for substrate handling and method for making the same | Edmund L. Ma, Christopher O. Lada | 2000-06-13 |