Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9293926 | Plasma processing systems having multi-layer segmented electrodes and methods therefor | Andreas Fischer | 2016-03-22 |
| 6663025 | Diffuser and rapid cycle chamber | Harlan I. Halsey | 2003-12-16 |