Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7099013 | System and method of broad band optical end point detection for film change indication | Vladimir Katz | 2006-08-29 |
| 6876455 | Method and apparatus for broadband optical end point determination for in-situ film thickness measurement | Vladimir Katz | 2005-04-05 |
| 6806948 | System and method of broad band optical end point detection for film change indication | Vladimir Katz | 2004-10-19 |