Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11270890 | Etching carbon layer using doped carbon as a hard mask | Amit Jain, Yasushi Ishikawa | 2022-03-08 |
| RE47650 | Method of tungsten etching | Ramkumar Subramanian, Yoko Yamaguchi | 2019-10-15 |
| 9230825 | Method of tungsten etching | Ramkumar Subramanian, Yoko Yamaguchi | 2016-01-05 |
| 8598040 | ETCH process for 3D flash structures | Jeffrey R. Lindain, Yasushi Ishikawa, Yoko Yamaguchi-Adams | 2013-12-03 |