Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6254787 | Method for establishing a fluid containing size-controlled particles | Masao Kimura, Kohei Tarutani | 2001-07-03 |
| 5882378 | Method to detect metal impurities in the semiconductor process gases | Kohei Tarutani | 1999-03-16 |