Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8461548 | Ion beam irradiation device and method for suppressing ion beam divergence | Dan Nicolaescu, Shigeki Sakai, Junzo Ishikawa | 2013-06-11 |
| 7935944 | Ion beam irradiating apparatus, and method of producing semiconductor device | Junzo Ishikawa, Dan Nicolaescu, Shigeki Sakai | 2011-05-03 |