Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9206513 | Apparatus for forming deposited film | Norikazu Ito, Koichiro Niira | 2015-12-08 |
| 9112088 | Method for manufacturing a thin-film solar cell using a plasma between parallel electrodes | Koichiro Niira, Norikazu Ito | 2015-08-18 |
| 8703586 | Apparatus for forming deposited film and method for forming deposited film | Norikazu Ito, Hiroshi Matsui, Koichiro Niira | 2014-04-22 |