Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7709099 | Bonded body, wafer support member using the same, and wafer treatment method | — | 2010-05-04 |
| 7586734 | Electrostatic chuck | Satoru Kamitani | 2009-09-08 |
| 7381673 | Composite material, wafer holding member and method for manufacturing the same | Naoko Itonaga | 2008-06-03 |
| 6414271 | Contact heating device | Takafumi Turumaru, Hiroyuki Arima, Hideaki Shimozuru | 2002-07-02 |
| 5219500 | Silicon nitride sintered body and process for preparation thereof | Makoto Yoshida, Masahiro Sato, Kazunori Koga, Kazumi Osamura, Shoji Kousaka +2 more | 1993-06-15 |
| 4920085 | Silicon nitride sintered body and process for preparation thereof | Makoto Yoshida, Masahiro Sato, Kazunori Koga, Kazumi Osamura, Shoji Kousaka +2 more | 1990-04-24 |
| 4892848 | Silicon nitride sintered body and process for preparation thereof | Makoto Yoshida | 1990-01-09 |
| 4891342 | Process for preparing a silicon nitride sintered body | — | 1990-01-02 |
| 4746636 | Silicon nitride sintered body | — | 1988-05-24 |
| 4716133 | Method for production of silicon nitride sintered body | Akito Horiuchi, Makoto Yoshida | 1987-12-29 |
| 4628039 | Sintered silicon nitride body | Michitaka Mizutani | 1986-12-09 |