Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12006264 | Porous ceramic, member for semiconductor manufacturing apparatus, shower plate and plug | — | 2024-06-11 |
| 11527388 | Member for plasma processing devices | — | 2022-12-13 |
| 10920318 | Shower plate, semiconductor manufacturing apparatus, and method for manufacturing shower plate | Yukio Noguchi, Yuuji KAWASE, Kouji Teramoto | 2021-02-16 |