Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6534751 | Wafer heating apparatus and ceramic heater, and method for producing the same | Kyoji Uchiyama, Kouji Sakamoto, Satoshi Tanaka | 2003-03-18 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6534751 | Wafer heating apparatus and ceramic heater, and method for producing the same | Kyoji Uchiyama, Kouji Sakamoto, Satoshi Tanaka | 2003-03-18 |