Issued Patents All Time
Showing 26–27 of 27 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5573591 | Method of exhausting silicon oxide | Kazuhiro Ikezawa, Hiroshi Yasuda, Akira Tanikawa, Hiroyuki Kojima, Koji Hosoda | 1996-11-12 |
| 5476065 | System for pulling-up monocrystal and method of exhausting silicon oxide | Kazuhiro Ikezawa, Hiroshi Yasuda, Akira Tanikawa, Hiroyuki Kojima, Koji Hosoda | 1995-12-19 |