Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10056248 | Method for measuring overall concentration of oxidizing substances, substrate cleaning method, and substrate cleaning system | — | 2018-08-21 |
| 10032623 | Method and system for cleaning semiconductor substrate | Yuichi Ogawa | 2018-07-24 |
| 10026628 | Semiconductor substrate cleaning method and cleaning system | Yuichi Ogawa | 2018-07-17 |
| 9791169 | Liquid heater | Minoru Uchida, Naoki Matsumoto | 2017-10-17 |
| 9593424 | Sulfuric acid recycling type cleaning system and a sulfuric acid recycling type persulfuric acid supply apparatus | Tatsuo Nagai, Norihito Ikemiya, Hideki Kobayashi, Hiroshi Morita | 2017-03-14 |