Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11776819 | Point etching module using annular surface dielectric barrier discharge apparatus and method for control etching profile of point etching module | Dong Chan Seok, Tai Hyeop Lho, Yong Ho Jung, Yong-Sup Choi, Kang Lee +1 more | 2023-10-03 |
| 11268191 | Atomic layer polishing method and device therefor | Yong-Sup Choi, Kang Lee, Dong Chan Seok, Jong Sik Kim, Seung Ryul Yoo | 2022-03-08 |
| 8648534 | Microwave antenna for generating plasma | Hyun Jong You, Yong Ho Jung, Bong Ju Lee | 2014-02-11 |