Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9190239 | Plasma immersion ion milling apparatus and method | Sung Il Chung, Hyeon Seok Oh, S. A. Nikiforov, Pan Kyeom Kim, Jeong Woo Jeon +1 more | 2015-11-17 |
| 8964167 | Cylindrical magnetic levitation stage and lithography | Jeong Woo Jeon, Hyeon Seok Oh, Mitica Caraiani, Sung Il Chung, Chang Rin Lee +1 more | 2015-02-24 |