Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12379654 | Pellicle for extreme ultraviolet lithography | Hyeong Keun Kim, Seul Gi Kim, Hyun Mi Kim, Jin-woo Cho | 2025-08-05 |
| 12282250 | Pellicle for extreme ultraviolet lithography based on yttrium | Hyeong Keun Kim, Seul Gi Kim, Hyun Mi Kim, Jin-woo Cho | 2025-04-22 |
| 11927881 | Pellicle for extreme ultraviolet lithography based on yttrium carbide | Hyeong Keun Kim, Seul Gi Kim, Hyun Mi Kim, Jin-woo Cho | 2024-03-12 |
| 11392049 | Pellicle for extreme ultraviolet lithography | Hyeong Keun Kim, Hyun Mi Kim, Jin-woo Cho, Seul Gi Kim | 2022-07-19 |