Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10290493 | Method for manufacturing silicon-containing thin film | Won Seok Han | 2019-05-14 |
| 7485349 | Thin film forming method | Chun Soo Lee | 2009-02-03 |
| 7141278 | Thin film forming method | Chun Soo Lee | 2006-11-28 |
| 6720262 | Method of forming copper interconnections and thin films using chemical vapor deposition with catalyst | Hyung Sang Park, Ji-Hwa Lee | 2004-04-13 |
| 6426117 | Method for forming a three-component nitride film containing metal and silicon | Kyoung Soo YI, Sang Won Kang | 2002-07-30 |
| 6409830 | Process for preparing a limo2 type heterometallic oxide film | Yun Soo Kim, Su-Jin Ku | 2002-06-25 |
| 6156916 | Volatile organometallic compound containing a divalent metal and a group 13 metal, process for preparing same, and process for preparing a heterometallic oxide film using same | Yun Soo Kim, Su-Jin Ku, Chang-Gyoun Kim, Kyu-Sang Yu | 2000-12-05 |
| 6063951 | Volatile magnesium alkylaluminum alkoxide and deposition of magnesium aluminate film using same | Yun Soo Kim, Su-Jin Ku | 2000-05-16 |
| 5998644 | Volatile organometallic compound containing a divalent metal and a group 13 metal, process for preparing same, and process for preparing a heterometallic oxide film using same | Yun Soo Kim, Su-Jin Ku, Chang-Gyoun Kim, Kyu-Sang Yu | 1999-12-07 |
| 5922405 | Process for the preparation of aluminum oxide film using dialkylaluminum alkoxide | Yun Soo Kim, Su-Jin Ku | 1999-07-13 |