Issued Patents All Time
Showing 26–45 of 45 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7167612 | Wavelength tunable filter capable of being bidirectionally driven by electromagnetic forces | Chang-Kyu Kim, Myung Lae Lee, Chang Auck Choi | 2007-01-23 |
| 7163872 | Tunable-wavelength optical filter and method of manufacturing the same | Chang Auck Choi, Myung Lae Lee, Chang-Kyu Kim, Youn Tae Kim | 2007-01-16 |
| 7116863 | Thermally actuated wavelength tunable optical filter | Chang-Kyu Kim, Myung Lae Lee, Chang Auck Choi, Yun-Tae Kim | 2006-10-03 |
| 7038229 | Electric switching device and electric circuit device having the same | Moon Youn Jung, Yun-Tae Kim | 2006-05-02 |
| 7012752 | Tunable-wavelength optical filter and method of manufacturing the same | Chang Auck Choi, Myung Lae Lee, Chang-Kyu Kim, Youn Tae Kim | 2006-03-14 |
| 6987435 | Micro-electromechanical actuators | Jong Soo Ko, Dae-Sik Lee, Myung Lae Lee, Youn Tae Kim | 2006-01-17 |
| 6951708 | Method of forming photosensitive film pattern | Moon Youn Jung | 2005-10-04 |
| 6947656 | Variable optical attenuator with tunable wavelength selectivity | Chang-Kyu Kim, Myung Lae Lee, Chang Auck Choi, Youn Tae Kim | 2005-09-20 |
| 6922270 | Multi-step landing micro-mirror, method for manufacturing the same and multi-step landing micro-mirror array | Moon Youn Jung, Chang Auck Choi, Yun-Tae Kim | 2005-07-26 |
| 6896780 | Microelectrode, microelectrode array and method for manufacturing the microelectrode | Hae Yang, Chang Auck Choi, Youn Tae Kim | 2005-05-24 |
| 6822776 | Scanning micromirror for optical communication systems and method of manufacturing the same | Doo-Young Hah, Ho Jun Ryu, Chang Auck Choi, Youn Tae Kim | 2004-11-23 |
| 6806205 | Stiction-free microstructure releasing method for fabricating MEMS device | Won Ick Jang, Chang Auck Choi, Youn Tae Kim, Myung Lae Lee | 2004-10-19 |
| 6791731 | Micro-optical switch and method for manufacturing the same | Ho Jun Ryu, Doo-Young Hah, Yun-Tae Kim | 2004-09-14 |
| 6582987 | Method of fabricating microchannel array structure embedded in silicon substrate | Chang Auck Choi, Youn Tae Kim | 2003-06-24 |
| 6531417 | Thermally driven micro-pump buried in a silicon substrate and method for fabricating the same | Chang Auck Choi, Won Ick Jang, Yun-Tae Kim | 2003-03-11 |
| 6342427 | Method for forming micro cavity | Chang Auck Choi, Won Ick Jang, Yun-Tae Kim | 2002-01-29 |
| 6165555 | Method for forming copper film using chemical vapor deposition | Youn Tae Kim, Jong Tae Baek | 2000-12-26 |
| 6069073 | Method for forming diffusion barrier layers | Youn Tae Kim, Jong Tae Baek | 2000-05-30 |
| 6066554 | Method of manufacturing three elemental diffusion barrier layer | Youn Tae Kim, Jong Tae Baek | 2000-05-23 |
| 5885898 | Method for forming diffusion barrier layer | Youn Tae Kim, Jong Tae Baek | 1999-03-23 |