Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6537141 | Non-slip polisher head backing film | Nelson W. White, II | 2003-03-25 |
| 6451698 | System and method for preventing electrochemical erosion by depositing a protective film | Wing Kei Au | 2002-09-17 |
| 6409579 | Method and apparatus for conditioning a polish pad at the point of polish and for dispensing slurry at the point of polish | Nelson W. White, II | 2002-06-25 |
| 6302771 | CMP pad conditioner arrangement and method therefor | Landon B. Vines | 2001-10-16 |
| 6110794 | Semiconductor having self-aligned, buried etch stop for trench and manufacture thereof | — | 2000-08-29 |
| 5953200 | Multiple pole electrostatic chuck with self healing mechanism for wafer clamping | Mark W. Haley | 1999-09-14 |