Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7364495 | Wafer double-side polishing apparatus and double-side polishing method | Toshiyuki Hayashi | 2008-04-29 |
| 5588902 | Apparatus for polishing wafers | Yoshinori Suzuki | 1996-12-31 |
| 5394903 | Hydraulic control valve | — | 1995-03-07 |