Issued Patents All Time
Showing 26–46 of 46 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8363514 | Variable operating voltage in micromachined ultrasonic transducer | — | 2013-01-29 |
| 8345513 | Stacked transducing devices | — | 2013-01-01 |
| 8247945 | Micro-electro-mechanical transducers | — | 2012-08-21 |
| 8120229 | Middle spring supported micro-electro-mechanical transducers | — | 2012-02-21 |
| 8105941 | Through-wafer interconnection | — | 2012-01-31 |
| 8018301 | Micro-electro-mechanical transducer having a surface plate | — | 2011-09-13 |
| 8008105 | Methods for fabricating micro-electro-mechanical devices | — | 2011-08-30 |
| 8004373 | MEMS ultrasonic device having a PZT and cMUT | — | 2011-08-23 |
| 7956510 | Modulation in micromachined ultrasonic transducers | — | 2011-06-07 |
| 7880565 | Micro-electro-mechanical transducer having a surface plate | — | 2011-02-01 |
| 7779696 | Separate cMUTs for reception and transmission | — | 2010-08-24 |
| 7764003 | Signal control in micromachined ultrasonic transducer | — | 2010-07-27 |
| 7759839 | Acoustic decoupling in cMUTs | — | 2010-07-20 |
| 7615834 | Capacitive micromachined ultrasonic transducer(CMUT) with varying thickness membrane | Burtis Khuri-Yakub, Arif Sanli Ergun, G. Göksenin Yaralioglu, Sean Hansen | 2009-11-10 |
| 7612635 | MEMS acoustic filter and fabrication of the same | — | 2009-11-03 |
| 7564172 | Micro-electro-mechanical transducer having embedded springs | — | 2009-07-21 |
| 7545075 | Capacitive micromachined ultrasonic transducer array with through-substrate electrical connection and method of fabricating same | Xuefeng Zhuang, Butrus T. Khuri-Yakub, Ching-Hsiang Cheng, Arif Sanli Ergun | 2009-06-09 |
| 7530952 | Capacitive ultrasonic transducers with isolation posts | Butrus T. Khuri-Yakub | 2009-05-12 |
| 6958255 | Micromachined ultrasonic transducers and method of fabrication | Butrus T. Khuri-Yakub, Arif Sanli Ergun | 2005-10-25 |
| 6189381 | Angular rate sensor made from a structural wafer of single crystal silicon | Martin Lim, Tariq M. Haniff, Weijie Yun | 2001-02-20 |
| 6010461 | Monolithic silicon intra-ocular pressure sensor and method therefor | Tariq M. Haniff, Martin Lim, Kevin Montegrande | 2000-01-04 |