Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10538842 | Deposition device having cooler with lifting mechanism | Atsushi Ishiyama, Hirofumi Fujii | 2020-01-21 |
| 9759488 | Heat treatment apparatus | Hideyuki Tsumura | 2017-09-12 |
| 9133547 | Plasma CVD apparatus | Hiroshi Tamagaki, Tadao Okimoto | 2015-09-15 |
| 8821638 | Continuous deposition apparatus | Hiroshi Tamagaki | 2014-09-02 |