Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11966203 | System and method to adjust a kinetics model of surface reactions during plasma processing | Ankur Agarwal, Chad Huard, Yiting Zhang, Xin Li, Premkumar Panneerchelvam +2 more | 2024-04-23 |
| 11320746 | Method and system for manufacturing integrated circuit | Ningqi Zhu, Shengyuan Zhong | 2022-05-03 |