SL

Shaoyu Lu

KL Kla-Tencor: 2 patents #566 of 1,394Top 45%
Overall (All Time): #1,919,337 of 4,157,543Top 50%
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Showing 1–2 of 2 patents

Patent #TitleCo-InventorsDate
10789703 Semi-supervised anomaly detection in scanning electron microscope images Li He, Sankar Venkataraman 2020-09-29
10074167 Reducing registration and design vicinity induced noise for intra-die inspection Saibal Banerjee, Ashok Kulkarni 2018-09-11