CO

Christopher Vreje Ohanian

KL Kla-Tencor: 1 patents #809 of 1,394Top 60%
Overall (All Time): #3,099,687 of 4,157,543Top 75%
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Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
8693856 Apparatus and methods for vacuum-compatible substrate thermal management Jason Keith Rowan, Li-Min Chen, Roni Robinzon 2014-04-08