Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12227848 | Substrate processing apparatus, method for processing substrate, and method for manufacturing semiconductor device | — | 2025-02-18 |
| 10741421 | Semiconductor manufacturing apparatus | Yukinobu MIYAMOTO | 2020-08-11 |