Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11600585 | Semiconductor device with metal plugs and method for manufacturing the same | — | 2023-03-07 |
| 11367622 | Manufacturing method of semiconductor device and etching gas | Toshiyuki Sasaki, Tomo HASEGAWA | 2022-06-21 |
| 10804113 | Manufacturing method of semiconductor device and etching gas | Toshiyuki Sasaki, Tomo HASEGAWA | 2020-10-13 |
| 10529582 | Plasma etching method and method of fabricating semiconductor device | — | 2020-01-07 |