Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12072273 | Measuring method and measuring apparatus | Takeshi Higuchi | 2024-08-27 |
| 11835854 | Imprint device, imprint method, and semiconductor device manufacturing method | Hirokazu Kato, Kei Kobayashi, Daizo Muto | 2023-12-05 |
| 11592741 | Imprinting method, semiconductor device manufacturing method and imprinting apparatus | Takeshi Higuchi, Hirokazu Kato | 2023-02-28 |