Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5759616 | Process for producing microstructure components on a substrate | Andreas Michel, Michael Harmening, Walter Bacher, Peter Bley, Alexander Both | 1998-06-02 |
| 5462640 | Etching solution | Walter Stark | 1995-10-31 |
| 5166826 | Band-pass filter for electromagnetic radiation | — | 1992-11-24 |