Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11883857 | Cleaning solution detection device | Hyung Chul Kim | 2024-01-30 |
| 11701693 | Substrate processing device comprising door unit having inclined surface | Hyung Chul Kim, Dong Hwa LEE | 2023-07-18 |