Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11630394 | Method and device for lithographically producing a target structure on a non-planar initial structure | Christian Koos, Philipp-Immanuel Dietrich, Matthias Blaicher, Maria Laura Gödecke, Nicole Lindenmann | 2023-04-18 |
| 11143966 | Method and device for lithographically producing a target structure on a non-planar initial structure | Christian Koos, Philipp-Immanuel Dietrich, Matthias Blaicher, Maria Laura Gödecke, Nicole Lindenmann | 2021-10-12 |