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Ceramic material having high resistivity and high corrosion resistance, and wafer placement table |
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Power conversion apparatus |
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2016-09-27 |
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Method of producing a thin-film photovoltaic device |
Hideo Yamagishi, Takayuki Suzuki |
2002-12-31 |
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Method and apparatus for manufacturing semiconductor device |
Hideo Yamagishi, Masataka Kondo |
2002-10-08 |
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Method of depositing thin film of metal oxide by magnetron sputtering apparatus |
Takayuki Suzuki |
2001-11-13 |
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Amorphous silicon-based thin film photovoltaic device |
— |
2001-06-26 |
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Amorphous semiconductor, amorphous semiconductor device using hydrogen radicals |
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1993-11-23 |
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Color sensor having laminated semiconductor layers |
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Method of stabilizing amorphous semiconductors |
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1990-10-23 |
