Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6325865 | Method for drying substrate | Hiromitsu Kurauchi | 2001-12-04 |
| 6244281 | Method and apparatus for drying substrate | Hiromitsu Kurauchi | 2001-06-12 |
| 5853284 | Notched wafer aligning apparatus | Ryo Ohzeki | 1998-12-29 |