Issued Patents All Time
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9620405 | Substrate transfer system, substrate processing system, and substrate transfer robot | Yoshiki Kimura | 2017-04-11 |
| 9570336 | Substrate transfer system and substrate processing system | Yoshiki Kimura | 2017-02-14 |
| 9293355 | Substrate transfer system and substrate processing system | Yoshiki Kimura | 2016-03-22 |
| 9272413 | Conveying system | Yoshiki Kimura, Tomohiro Matsuo, Yoshihiro Kusama | 2016-03-01 |
| 9266234 | Transfer robot and substrate processing apparatus | — | 2016-02-23 |
| 9252036 | Substrate transfer system, substrate processing system, and substrate transfer robot | Yoshiki Kimura | 2016-02-02 |
| 9252035 | Substrate transfer system, substrate processing system, and substrate transfer robot | Yoshiki Kimura | 2016-02-02 |
| 9108320 | Suction structure, robot hand and robot | — | 2015-08-18 |
| 9028197 | Robot with plurality of belts and intermediate pulley | Osamu Komiyaji, Masayuki Suzuki, Hiroki SANEMASA | 2015-05-12 |
| 8992160 | Transfer robot | — | 2015-03-31 |
| 8833196 | Gear unit and robot | Hiroki SANEMASA | 2014-09-16 |
| 8807911 | Transfer robot and equipment front end module including transfer robot with vent part | Masayuki Suzuki | 2014-08-19 |
| 8444194 | Substrate transport hand and substrate transport robot | — | 2013-05-21 |
| 7956286 | Cable handling structure for linear axis, and substrate transfer device equipped with the same | — | 2011-06-07 |