Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7436513 | Wafer pre-alignment apparatus and method | Shinichi Katsuda, Yuji Arinaga | 2008-10-14 |
| 7266567 | Absolute encoder and absolute value signal generation method | Koji Suzuki, Yuji Arinaga | 2007-09-04 |
| 7154113 | Techniques for wafer prealignment and sensing edge position | Yuji Arinaga, Shinichi Katsuda, Takayuki Imanaka | 2006-12-26 |
| 7109511 | Techniques for wafer prealignment and sensing edge positions | Yuji Arinaga, Shinichi Katsuda, Takayuki Imanaka | 2006-09-19 |
| 6384752 | Absolute encoder | Koji Suzuki | 2002-05-07 |