Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8355218 | Optical element position adjusting mechanism and optical element position adjusting method, exposure apparatus using same, and device manufacturing method | — | 2013-01-15 |
| 8350518 | Control apparatus for matrix converter | Yozo Ueda, Ryuji Suenaga | 2013-01-08 |