Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6151796 | Substrate drying device, drying method and substrate dried by the same | Hamataro Karamatsu, Seiji Katayama | 2000-11-28 |
| 5980103 | Apparatus and method for testing thermal fatigue resistance | Hajime Ikuno | 1999-11-09 |