Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6051371 | Method for baking photoresist applied on substrate | Katsuhisa Mita, Yasuo Matsuoka, Kenichi Taniyama, Michirou Takano, Kaoru Kanda | 2000-04-18 |
| 6033474 | Apparatus for baking photoresist applied on substrate | Katsuhisa Mita, Yasuo Matsuoka, Kenichi Taniyama, Michirou Takano, Kaoru Kanda | 2000-03-07 |
| 5817178 | Apparatus for baking photoresist applied on substrate | Katsuhisa Mita, Yasuo Matsuoka, Kenichi Taniyama, Michirou Takano, Kaoru Kanda | 1998-10-06 |