Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6459947 | Apparatus using positional data detected in a non-contact manner to transfer a substantially rectangular substrate from a first position to a second position | Noriyuki Hirata | 2002-10-01 |
| 6327512 | Method and apparatus using positional data detected in a non-contact manner to transfer a substrate from a first position to a second position | Noriyuki Hirata | 2001-12-04 |
| 5740059 | Method of transporting substrates and apparatus for transporting substrates | Noriyuki Hirata | 1998-04-14 |