Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12424460 | Substrate processing apparatus | Shusaku Matsumoto, Koichiro Kawano | 2025-09-23 |
| 10870913 | Processing device, sputtering device, and collimator | Masakatsu Takeuchi, Yasuhiro Aoyama, Takahiro Terada, Yoshinori TOKUDA | 2020-12-22 |
| 10844485 | Flow passage structure and processing apparatus | Shinya Higashi, Takahiro Terada, Takuya Matsuda, Masayuki Tanaka | 2020-11-24 |
| 10777395 | Processing apparatus and collimator | Masakatsu Takeuchi, Yasuhiro Aoyama, Takahiro Terada, Yoshinori TOKUDA | 2020-09-15 |
| 10774420 | Flow passage structure and processing apparatus | Takahiro Terada, Shinya Higashi, Masayuki Tanaka, Takuya Matsuda | 2020-09-15 |
| 10755904 | Processing apparatus and collimator | Takahiro Terada, Masayuki Tanaka | 2020-08-25 |
| 10312113 | Flow passage structure, intake and exhaust member, and processing apparatus | Takahiro Terada, Masayuki Tanaka | 2019-06-04 |
| 10220394 | Nozzle device and processing apparatus | Masayuki Tanaka, Takahiro Terada, Yusuke Suzuki | 2019-03-05 |
| 10147589 | Processing apparatus and collimator | Takahiro Terada, Masayuki Tanaka | 2018-12-04 |
| 9586303 | Polishing device and method for polishing semiconductor wafer | — | 2017-03-07 |
| 9550273 | Polishing device and method of polishing semiconductor wafer | Yuichiro Fujiyama, Takumi Takahashi, Taku Maruo | 2017-01-24 |